# sputtering yield : Ne -> Al # z1=10 , m1= 20.18 , z2=13 , m2= 26.98 , sbe=3.36 eV, rho=2.70 g/cm**3 # ef= , esb=0.00 , kk0=kk0r=2 , kdee1=4,kdee2=3 , ipot=ipotr=1 (KrC) # program: IPP 9/82 # ne=14, na=1 # # e0 0 # 20 2.40e-4 30 4.46e-3 50 3.90e-2 100 1.74e-1 200 3.85e-1 500 6.92e-1 1000 9.17e-1 2000 1.06e-0 5000 1.13e-0 10000 1.09e-0 20000 9.71e-1 50000 7.64e-1 100000 5.53e-1 200000 4.12e-1