# sputtering yield : Xe -> Au # z1=54, m1=131.00, z2=79, m2=196.97, sbe=3.80 eV, rho=19.30 g/cm**3 # ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # program: trspvmcx, cascpol, trsptest, IPP 9/82 # ne= 9, na= 2 # # e0 0 75 # 50 2.70e-2 100 2.16e-1 300 1.07e-0 500 1.71e-0 1000 2.87e-0 2000 4.49e-0 2000 6.54e-0 4.29e-0 !ca=1.09 3000 5.54e-0 4000 5.95e-0