% sputtered energy : O -> B4C % z1= 8, m1= 16.00, z2= 5 (0.8), 6 (0.2), m2= 10.81, 12.01, sbe=5.90, 7.40 eV, # rho=0.85, 1.62, 2.28 g/cm**3, sbe(average)=1.17, 1.28, 2.21, 6.05 eV, alpha=0.00 % ef=2.10 eV, esb=2.60 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program: trspvmc % only low fluence ! % ne= 5, na= 1, n(rho)= 4 % # 0.85 0.85 1.62 2.28 2.28 2.28 2.52 ! rho # 1.17 2.21 1.28 1.17 2.21 6.05 5.98 ! sbe(average) # # e0 0 0 0 0 0 0 0 # # B # 100 3.96e-4 150 7.37e-3 3.42e-3 1.01e-2 1.36e-2 5.88e-3 9.71e-4 300 7.85e-3 4.46e-3 9.38e-3 1.32e-2 8.49e-3 2.50e-3 2.69e-3 1000 5.72e-3 4.74e-3 6.52e-3 8.32e-3 6.63e-3 3.90e-3 4.14e-3 3000 5.13e-3 3.71e-3 4.16e-3 5.36e-3 4.36e-3 2.60e-3 2.70e-3 # # C # 100 8.62e-5 150 1.79e-3 8.20e-4 2.07e-3 2.89e-3 1.36e-3 2.04e-4 300 1.53e-3 9.69e-4 2.48e-3 3.10e-3 1.82e-3 5.17e-4 6.04e-4 1000 1.27e-3 1.25e-3 1.58e-3 1.96e-3 1.66e-3 8.12e-4 8.59e-4 3000 9.54e-4 4.64e-4 8.75e-4 1.51e-3 1.09e-3 6.58e-4 6.01e-4 # # total yield # 100 4.78e-4 150 9.16e-3 4.24e-3 1.22e-2 1.65e-2 7.25e-3 1.18e-3 300 9.38e-3 5.43e-3 1.19e-2 1.63e-2 1.03e-2 3.02e-3 3.29e-3 1000 6.98e-3 5.99e-3 8.09e-3 1.03e-2 8.30e-3 4.17e-3 4.99e-3 3000 6.08e-3 4.17e-3 5.03e-3 6.87e-3 5.45e-3 3.26e-3 3.30e-3