# sputtered energy : O -> B(OH)3 on B4C # z1= 8, m1= 16.00 # 1.layer: z2= 5 (0.14), 8 (0.43), 1 (0.43), m2= 10.81, 16.00, 1.01, # sbe=5.90, 2.50, 2.19 eV, sbe_mean=1.22 eV, rho=0.85 g/cm**3 # 2.layer: z2= 5 (0.80), 6 (0.20), m2= 10.81, 12.01 # sbe=5.90, 7.40 eV, sbe_mean=6.05 eV, rho= 2.28 g/cm**3 # ef=2.10 eV, esb=2.60 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # alpha=0.00, dx(B(OH)3)=2,...,20 A, dx(b4c)=10000 A # program: trspvmc # only low fluence ! # ne= 4, na= 1, n(dx(1))= 7 # # 2 3 4 5 7 10 20 # e0 # # B (1.layer) # 150 3.88e-4 7.36e-4 9.02e-4 7.81e-4 1.26e-3 1.22e-3 300 3.49e-4 6.59e-4 1.02e-3 1.10e-3 9.92e-4 1.28e-3 1.46e-3 1000 2.33e-4 4.75e-4 4.33e-4 6.64e-4 6.69e-4 8.80e-4 9.68e-4 3000 1.60e-4 1.90e-4 2.24e-4 # # O (1.layer) # 150 9.14e-4 1.98e-3 2.57e-3 2.72e-3 3.10e-3 2.74e-3 300 9.37e-4 1.73e-3 2.52e-3 2.30e-3 2.54e-3 3.34e-3 3.10e-3 1000 7.48e-4 1.19e-3 1.42e-3 1.75e-3 2.18e-3 1.95e-3 2.80e-3 3000 4.04e-4 8.04e-4 7.25e-4 # # H (1.layer) # 150 1.60e-3 2.20e-3 2.62e-3 2.84e-3 3.72e-3 3.28e-3 300 1.64e-3 2.15e-3 2.82e-3 3.10e-3 3.85e-3 5.33e-3 4.91e-3 1000 1.30e-3 1.62e-3 1.89e-3 2.29e-3 2.44e-3 3.52e-3 5.15e-3 3000 1.16e-3 1.02e-3 9.40e-4 # B (2.layer) # 150 5.27e-3 3.07e-3 1.22e-3 4.12e-4 1.42e-4 4.65e-6 300 4.90e-3 3.28e-3 1.52e-3 7.48e-4 3.54e-4 4.00e-5 1000 3.79e-3 2.31e-3 1.67e-3 1.26e-3 1.17e-3 2.87e-4 9.37e-5 3000 1.35e-3 8.06e-4 1.43e-3 # C (2.layer) # 100 1.25e-3 6.85e-4 3.05e-4 1.23e-4 300 1.17e-3 6.81e-4 2.51e-4 1.18e-4 6.86e-5 1000 7.81e-4 6.70e-4 3.01e-4 3.08e-4 2.14e-4 8.77e-5 6.54e-5 3000 2.51e-4 1.74e-4 1.56e-4