% sputtered energy : Ar -> Be % z1=18, m1= 39.95, z2= 4, m2= 9.01, sbe=3.38 eV, rho=1.80 g/cm**3 % ef=0.20 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % ne=23 na=9 # # 0 15 30 45 55 65 75 80 85 # 13 9.75e-9 4.49e-8 6.19e-8 9.51e-8 4.58e-8 14 8.70e-8 2.38e-7 3.27e-7 4.68e-7 1.76e-7 15 1.72e-8 9.43e-7 1.76e-6 2.05e-6 1.67e-6 5.09e-7 16 8.72e-8 2.17e-6 4.05e-6 5.52e-6 4.45e-6 1.34e-6 17 2.28e-7 3.98e-6 7.77e-6 1.24e-5 1.00e-5 3.19e-6 18 4.90e-7 6.61e-6 1.41e-5 2.48e-5 2.03e-5 5.75e-6 1.56e-7 20 2.53e-8 1.55e-6 1.54e-5 3.70e-5 8.09e-5 6.12e-5 1.61e-5 3.80e-7 22 9.68e-8 3.93e-6 3.07e-5 9.34e-5 2.17e-4 1.39e-4 3.60e-5 8.76e-7 25 1.89e-8 4.14e-7 1.03e-5 8.67e-5 3.03e-4 6.52e-4 3.69e-4 8.62e-5 2.10e-6 30 2.75e-7 2.11e-6 3.58e-5 3.56e-4 1.14e-3 2.12e-3 1.06e-3 2.38e-4 5.40e-6 35 1.23e-6 7.52e-6 1.05e-4 9.40e-4 2.76e-3 4.66e-3 2.13e-3 4.62e-4 1.07e-5 40 3.64e-6 2.02e-5 2.45e-4 1.93e-3 5.18e-3 8.02e-3 3.60e-3 7.69e-4 1.76e-5 45 8.67e-6 4.36e-5 4.61e-4 3.23e-3 8.07e-3 1.22e-2 5.21e-3 1.12e-3 2.58e-5 50 1.78e-5 7.94e-5 7.52e-4 4.83e-3 1.15e-2 1.67e-2 7.21e-3 1.51e-3 3.31e-5 60 5.17e-5 1.99e-4 1.56e-3 8.63e-3 1.90e-2 2.71e-2 1.17e-2 2.42e-3 5.04e-5 70 1.11e-4 3.83e-4 2.55e-3 1.25e-2 2.69e-2 3.81e-2 1.65e-2 3.47e-3 6.78e-5 100 4.26e-4 1.17e-3 5.80e-3 2.29e-2 4.74e-2 6.89e-2 3.24e-2 6.58e-3 1.15e-4 150 1.19e-3 2.68e-3 1.00e-2 3.38e-2 6.83e-2 1.05e-1 5.84e-2 1.27e-2 1.88e-4 200 1.92e-3 3.91e-3 1.28e-2 3.96e-2 7.79e-2 1.27e-1 8.12e-2 1.96e-2 2.62e-4 300 3.09e-3 5.49e-3 1.59e-2 4.48e-2 8.48e-2 1.46e-1 1.18e-1 3.42e-2 4.24e-4 500 4.48e-3 7.27e-3 1.82e-2 4.71e-2 8.64e-2 1.54e-1 1.67e-1 6.55e-2 9.72e-4 700 5.21e-3 7.94e-3 1.90e-2 4.71e-2 8.50e-2 1.53e-1 1.92e-1 9.60e-2 1.80e-3 1000 5.58e-3 8.31e-3 1.91e-2 4.61e-2 8.24e-2 1.48e-1 2.09e-1 1.31e-1 3.89e-3