% mean depth (A)(1.moment of depth distribution of implanted D) : D -> Be
% z1= 1, m1=  2.01, z2= 4, m2=  9.01, sbe=3.38 eV, rho=1.80 g/cm**3
% ef=0.95 eV, esb=1.00 eV, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% ca=1.00
% program : trvmc
% ne=19, na=10
%
%  e0     0      15      30      45      55      60      65      75      80      85
%
   10  4.20e+0                              
   11  4.53e+0 4.47e+0 4.31e+0 4.06e+0 3.87e+0         3.63e+0 3.37e+0 3.24e+0 3.12e+0
   12  4.85e+0 4.78e+0 4.61e+0 4.35e+0 4.14e+0 4.01e+0 3.89e+0 3.62e+0 3.48e+0 3.38e+0
   13  5.16e+0 5.08e+0 4.90e+0 4.62e+0 4.40e+0 4.26e+0 4.14e+0 3.86e+0 3.72e+0 3.60e+0
   14  5.47e+0 5.39e+0 5.19e+0 4.88e+0 4.66e+0         4.39e+0 4.09e+0 3.95e+0 3.82e+0
   15  5.77e+0 5.68e+0 5.47e+0 5.15e+0 4.90e+0 4.75e+0 4.62e+0 4.32e+0 4.17e+0 4.04e+0
   17  6.36e+0 6.26e+0 6.02e+0 5.66e+0 5.39e+0         5.08e+0 4.76e+0 4.59e+0 4.44e+0
   20  7.21e+0 7.10e+0 6.82e+0 6.39e+0 6.08e+0 5.91e+0 5.74e+0 5.39e+0 5.21e+0 5.02e+0
   25  8.61e+0 8.48e+0 8.11e+0 7.59e+0 7.20e+0 6.99e+0 6.79e+0 6.37e+0 6.17e+0 5.96e+0
   30  9.95e+0 9.79e+0 9.36e+0 8.74e+0 8.29e+0 8.11e+0 7.81e+0 7.36e+0 7.09e+0 6.84e+0
   40  1.26e+1 1.24e+1 1.18e+1 1.10e+1 1.04e+1         9.78e+0 9.19e+0 8.86e+0 8.59e+0
   50  1.52e+1 1.49e+1 1.42e+1 1.31e+1 1.24e+1 1.20e+1 1.17e+1 1.10e+1 1.06e+1 1.02e+1
   70  2.02e+1 1.98e+1 1.89e+1 1.74e+1 1.63e+1         1.54e+1 1.45e+1 1.41e+1 1.34e+1
  100  2.76e+1 2.71e+1 2.57e+1 2.37e+1 2.21e+1 2.15e+1 2.07e+1 1.94e+1 1.88e+1 1.85e+1  
  140  3.75e+1 3.69e+1 3.47e+1 3.18e+1 2.97e+1         2.77e+1 2.60e+1 2.52e+1 2.42e+1
  200  5.22e+1 5.12e+1 4.82e+1 4.41e+1 4.08e+1 3.91e+1 3.79e+1 3.52e+1 3.43e+1 3.33e+1 
  300  7.68e+1 7.51e+1 7.07e+1 6.40e+1 5.88e+1         5.44e+1 5.03e+1 4.90e+1 4.85e+1
  500  1.26e+2 1.24e+2 1.15e+2 1.03e+2 9.47e+1 9.06e+1 8.66e+1 7.94e+1 7.69e+1 7.60e+1
 1000  2.51e+2 2.45e+2 2.26e+2 1.99e+2 1.81e+2 1.69e+2 1.61e+2 1.45e+2 1.39e+2 1.37e+2