% sputtering yield : D -> Be % z1= 1, m1= 2.01, z2= 4, m2= 9.01, sbe=3.38 eV, rho=1.80 g/cm**3 % ef=0.95 eV, esb=1.00 eV, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % ca=1.00 % program : trvmc, IPP 9/82 % ne=21, na=10 % % e0 0 15 30 45 55 60 65 70 75 80 85 87 % 10 4.13e-6 4.30e-6 4.56e-6 11 2.61e-5 3.05e-5 3.15e-5 2.69e-5 1.86e-5 1.00e-5 3.67e-6 8.00e-7 5.00e-7 12 9.29e-5 1.07e-4 1.25e-4 1.14e-4 8.71e-5 6.81e-5 5.37e-5 2.31e-5 1.39e-5 9.62e-6 13 2.32e-4 2.67e-4 3.47e-4 3.16e-4 2.61e-4 2.10e-4 1.62e-4 7.67e-5 4.78e-5 3.18e-5 14 4.65e-4 5.50e-4 6.90e-4 6.91e-4 5.92e-4 3.92e-4 1.91e-4 1.20e-4 7.85e-5 15 8.10e-4 9.42e-4 1.21e-3 1.29e-3 1.12e-3 9.82e-4 7.97e-4 4.11e-4 2.57e-4 1.65e-4 17 1.73e-3 2.02e-3 2.60e-3 3.03e-3 2.92e-3 2.29e-3 1.25e-3 7.67e-4 4.62e-4 20 3.64e-3 4.19e-3 5.46e-3 7.03e-3 7.46e-3 7.12e-3 6.59e-3 3.76e-3 2.14e-3 1.16e-3 25 7.30e-3 8.25e-3 1.11e-2 1.57e-2 1.87e-2 1.94e-2 1.85e-2 1.08e-2 5.51e-3 2.51e-3 30 1.08e-2 1.22e-2 1.69e-2 2.54e-2 3.25e-2 3.58e-2 3.46e-2 2.07e-2 1.02e-2 3.82e-3 40 1.68e-2 1.90e-2 2.64e-2 4.34e-2 6.08e-2 7.17e-2 4.54e-2 2.12e-2 5.91e-3 50 2.09e-2 2.40e-2 3.45e-2 5.78e-2 8.53e-2 9.88e-2 1.07e-1 7.40e-2 3.23e-2 7.37e-3 70 2.63e-2 3.04e-2 4.43e-2 7.94e-2 1.19e-1 1.60e-1 1.28e-1 5.90e-2 9.51e-3 100 3.10e-2 3.59e-2 5.42e-2 9.78e-2 1.49e-1 1.80e-1 2.13e-1 2.00e-1 1.01e-1 1.27e-2 140 3.32e-2 3.94e-2 6.11e-2 1.08e-1 1.68e-1 2.48e-1 2.71e-1 1.60e-1 1.82e-2 200 3.51e-2 4.03e-2 6.32e-2 1.14e-1 1.77e-1 2.20e-1 2.68e-1 3.42e-1 2.43e-1 2.93e-2 300 3.44e-2 4.20e-2 6.34e-2 1.12e-1 1.75e-1 2.12e-1 2.72e-1 3.91e-1 3.42e-1 5.71e-2 500 3.24e-2 3.85e-2 5.82e-2 1.04e-1 1.50e-1 1.98e-1 2.57e-1 4.08e-1 4.39e-1 1.38e-1 1000 2.53e-2 2.96e-2 4.37e-2 7.80e-2 1.25e-1 1.54e-1 2.06e-1 3.65e-1 4.59e-1 3.34e-1 2000 1.76e-2 3000 1.25e-2 2.02e-2 3.43e-2 7.29e-2 1.29e-1 2.89e-1 4.59e-1 3.18e-1