% mean depth (A)(1.moment of depth distribution of implanted H) : H -> Be % z1=1 , m1= 1.01, z2= 4, m2= 9.01, sbe=3.38 eV, rho= 1.80 g/cm**3 % ef=0.98eV, esb=1.00 eV, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % ca=1.0 % program : trvmc (ncube) % ne=18 na=10 % % e0 0 15 30 45 55 60 65 75 80 85 % 10 5.11e+0 5.06e+0 4.96e+0 4.79e+0 4.65e+0 4.49e+0 4.32e+0 4.24e+0 4.18e+0 15 6.88e+0 6.81e+0 6.64e+0 6.39e+0 6.20e+0 6.09e+0 5.98e+0 5.74e+0 5.58e+0 5.58e+0 17 7.55e+0 7.47e+0 7.27e+0 6.99e+0 6.77e+0 6.65e+0 6.54e+0 6.29e+0 6.17e+0 6.05e+0 20 8.52e+0 8.43e+0 8.20e+0 7.86e+0 7.61e+0 7.47e+0 7.34e+0 7.07e+0 6.93e+0 6.80e+0 22 9.15e+0 9.05e+0 8.80e+0 8.43e+0 8.15e+0 7.86e+0 7.57e+0 7.41e+0 7.27e+0 25 1.01e+1 1.00e+1 9.69e+0 9.25e+0 8.95e+0 8.79e+0 8.63e+0 8.30e+0 8.14e+0 7.98e+0 27 1.07e+1 30 1.16e+1 1.15e+1 1.11e+1 1.06e+1 1.02e+1 1.01e+1 9.86e+0 9.49e+0 9.30e+0 9.13e+0 40 1.45e+1 1.44e+1 1.39e+1 1.32e+1 1.27e+1 1.25e+1 1.22e+1 1.18e+1 1.16e+1 1.13e+1 50 1.74e+1 1.71e+1 1.65e+1 1.57e+1 1.51e+1 1.47e+1 1.45e+1 1.39e+1 1.37e+1 1.34e+1 70 2.28e+1 2.25e+1 2.17e+1 2.05e+1 1.95e+1 1.91e+1 1.87e+1 1.80e+1 1.77e+1 1.74e+1 100 3.07e+1 3.03e+1 2.91e+1 2.73e+1 2.60e+1 2.54e+1 2.48e+1 2.38e+1 2.34e+1 2.31e+1 140 4.09e+1 4.03e+1 3.85e+1 3.60e+1 3.42e+1 3.24e+1 3.10e+1 3.05e+1 3.00e+1 200 5.58e+1 5.48e+1 5.23e+1 4.86e+1 4.58e+1 4.44e+1 4.33e+1 4.11e+1 4.05e+1 4.06e+1 300 8.00e+1 7.84e+1 7.44e+1 6.86e+1 6.41e+1 6.03e+1 5.67e+1 5.57e+1 5.54e+1 500 1.26e+2 1.23e+2 1.17e+2 1.06e+2 9.82e+1 9.45e+1 9.10e+1 8.50e+1 8.28e+1 8.25e+1 1000 2.37e+2 2.31e+2 2.15e+1 1.91e+1 1.74e+2 1.65e+2 1.57e+2 1.43e+2 1.38e+2 1.36e+2 2000 2.80e+2