% sputtering yield : He3 -> Be
% z1= 2, m1=  3.02, z2= 4, m2=  9.01, sbe=3.38 eV, rho=1.80 g/cm**3      
% ef=0.5 eV, esb=0.00 eV, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% ca=0.00
% programs: trvmc
% ne= 7  na=1
%                                                                               
%  e0     0      
%
   20  3.29e-3
   30  1.61e-2
   50  4.07e-2
  100  7.04e-2  
  200  9.38e-2 
  500  9.87e-2
 1000  9.56e-2