% sputtered energy : He3 -> Be % z1= 2, m1= 3.02, z2= 4, m2= 9.01, sbe=3.38 eV, rho=1.80 g/cm**3 % ef=0.5 eV, esb=0.00 eV, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % ca=0.00 % programs: trvmc % ne= 7 na=1 % % e0 0 % 20 2.49e-4 30 1.19e-3 50 2.72e-3 100 3.71e-3 200 3.40e-3 500 2.07e-3 1000 1.29e-3