% mean depth (A)(1.moment of depth distribution of implanted T) : T -> Be % z1= 1, m1= 3.02, z2= 4, m2= 9.01, sbe=3.38 eV, rho=1.80 g/cm**3 % ef=0.98 eV, esb=1.00 eV, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % ca=1.00 % program: trvmc % ne=15, na=10 % % e0 0 15 30 45 55 60 65 75 80 85 % 10 3.73e+0 3.66e+0 3.47e+0 3.18e+0 2.94e+0 2.77e+0 2.64e+0 2.29e+0 2.12e+0 1.99e+0 11 4.04e+0 3.96e+0 3.77e+0 3.46e+0 3.21e+0 2.90e+0 2.54e+0 2.36e+0 2.22e+0 12 4.34e+0 4.26e+0 4.05e+0 3.72e+0 3.46e+0 3.29e+0 3.14e+0 2.77e+0 2.59e+0 2.44e+0 13 4.63e+0 4.54e+0 4.32e+0 3.97e+0 3.70e+0 3.37e+0 3.00e+0 2.81e+0 2.65e+0 15 5.19e+0 5.10e+0 4.84e+0 4.46e+0 4.16e+0 3.98e+0 3.81e+0 3.42e+0 3.21e+0 3.04e+0 17 5.74e+0 5.63e+0 5.34e+0 4.92e+0 4.60e+0 4.24e+0 3.82e+0 3.59e+0 3.40e+0 20 6.53e+0 6.41e+0 6.08e+0 5.59e+0 5.22e+0 5.01e+0 4.81e+0 4.38e+0 4.16e+0 3.93e+0 25 7.82e+0 7.66e+0 7.24e+0 6.65e+0 6.20e+0 5.98e+0 5.74e+0 5.24e+0 4.97e+0 4.73e+0 30 9.07e+0 8.88e+0 8.39e+0 7.68e+0 7.16e+0 6.63e+0 6.07e+0 5.75e+0 5.47e+0 50 1.39e+1 1.36e+1 1.28e+1 1.16e+1 1.08e+1 1.00e+1 9.15e+0 8.75e+0 8.26e+0 100 2.55e+1 2.50e+1 2.34e+1 2.11e+1 1.94e+1 1.78e+1 1.64e+1 1.57e+1 1.47e+1 200 4.88e+1 4.76e+1 4.44e+1 3.97e+1 3.63e+1 3.31e+1 3.03e+1 2.93e+1 2.83e+1 300 7.25e+1 7.07e+1 6.58e+1 5.86e+1 5.32e+1 4.82e+1 4.40e+1 4.23e+1 4.09e+1 500 1.22e+2 1.18e+2 1.10e+2 9.68e+1 8.74e+1 7.85e+1 7.10e+1 6.81e+1 6.59e+1 1000 2.49e+2 2.42e+2 2.22e+2 1.94e+2 1.73e+2 1.53e+2 1.36e+2 1.29e+2 1.25e+2