% sputtering yield : Ar -> C
% z1=18, m1= 39.95, z2= 6, m2= 12.01, sbe=7.40, 7.42 eV, rho=2.26 g/cm**3
% ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trspvmcx
% ne= 9, na= 1
%
%   e0     0
%
   100  8.51E-4
   100  8.60e-4
   200  1.80e-2
   300  4.96E-2
   500  1.23E-1
   500  1.20e-1
  1000  2.64E-1
  1000  2.67e-1
  4000  6.32E-1