# sputtering yield : Ar -> C # z1=18, m1= 39.95, z2= 6, m2= 12.01, Es=7.41 eV, rho=1.85 g/cm**3 # ef=0.05 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # program: trvmc # ne=11, na=9 # # e0 0 15 30 45 55 65 75 80 85 # 25 1.60e-7 1.88e-5 4.80e-5 4.12e-5 1.62e-5 4.00e-6 9.00e-8 30 4.44e-6 9.87e-5 1.94e-4 2.29e-4 1.32e-4 3.73e-5 7.10e-7 40 1.80e-7 2.52e-6 7.96e-5 6.71e-4 1.75e-3 3.40e-3 1.77e-3 3.74e-4 7.38e-6 50 2.46e-6 2.31e-5 4.18e-4 3.20e-3 8.55e-3 1.47e-2 6.49e-3 1.33e-3 2.33e-5 70 6.64e-5 3.67e-4 3.54e-3 2.00e-2 4.57e-2 6.11e-2 2.65e-2 5.31e-3 9.35e-5 100 8.27e-4 2.98e-3 1.76e-2 7.25e-2 1.40e-1 1.78e-1 7.67e-2 1.60e-2 2.73e-4 140 4.62e-3 1.18e-2 4.90e-2 1.63e-1 2.99e-1 3.76e-1 1.72e-1 3.94e-2 6.61e-4 200 1.66e-2 3.34e-2 1.05e-1 2.94e-1 5.21e-1 6.75e-1 3.46e-1 8.68e-2 1.53e-3 300 4.54e-2 7.57e-2 1.93e-1 4.70e-1 8.13e-1 1.10e-0 6.73e-1 1.96e-1 3.94e-3 500 1.09e-1 1.60e-1 3.34e-1 7.22e-1 1.19e-0 1.73e-0 1.34e-0 4.96e-1 1.31e-2 1000 2.47e-1 3.21e-1 5.68e-1 1.09e-0 1.72e-0 2.62e-0 2.75e-0 1.46e-0 6.94e-2