% sputtering yield : D -> C
% z1= 1, m1=  2.01, z2= 6, m2= 12.01, sbe=7.41 eV, rho=1.85 g/cm**3
% ef=0.98 eV, esb=1.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trvmc
% ne=12, na= 9
%
%  e0     0      15      30      45      55      65      75      80      85
%
   30  8.58E-5 1.12E-4 1.78E-4 2.30E-4 2.08E-4 1.12E-4 2.55E-5 8.60E-6 2.56E-6
   33  2.16e-4                                 3.29e-4
   40  7.35E-4 9.15E-4 1.26E-3 1.72E-3 2.21E-3 1.80E-3 7.60E-4 3.12E-4 9.35E-5
   50  1.96E-3 2.33E-3 3.09E-3 4.58E-3 5.87E-3 5.95E-3 4.15E-3 1.76E-3 4.45E-4
   70  4.79E-3 5.19E-3 7.01E-3 1.13E-2 1.57E-2 2.14E-2 1.78E-2 8.60E-3 1.57E-3
  100  8.18E-3 8.77E-3 1.21E-2 1.96E-2 3.08E-2 4.59E-2 4.78E-2 2.72E-2 4.04E-3
  140  1.10E-2 1.21E-2 1.68E-2 2.88E-2 4.40E-2 7.03E-2 8.63E-2 5.73E-2 8.17E-3
  200  1.32E-2 1.48E-2 2.41E-2 3.56E-2 5.93E-2 9.10E-2 1.21E-1 9.76E-2 1.41E-2
  300  1.47E-2 1.66E-2 2.40E-2 4.33E-2 6.81E-2 1.13E-1 1.63E-1 1.51E-1 2.94E-2
  500  1.44E-2 1.72E-2 2.72E-2 4.58E-2 7.39E-2 1.20E-1 1.89E-1 2.12E-1 7.29E-2
 1000  1.30E-2 1.49E-2 2.36E-2 4.18E-2 6.49E-2 1.08E-1 1.90E-1 2.35E-1 1.72E-1
 2000  1.02e-2                 3.45e-2                 1.88e-1 2.22e-1 2.45e-1