% sputtering yield : Ne -> C % z1=10, m1= 20.18, z2= 6, m2= 12.01, sbe=7.41, rho=1.85 g/cm**3 % ef=0.05 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program : trvmc % ne=24, na= 9 % % e0 0 15 30 45 55 65 75 80 85 % 15 9.51e-7 7.53e-7 16 1.17e-6 3.45e-6 2.15e-6 17 3.60e-6 7.68e-6 5.34e-6 1.38e-6 18 8.20e-6 1.40e-5 1.04e-5 3.60e-6 1.09e-6 20 1.23e-6 4.15e-5 6.95e-5 5.65e-5 2.28e-5 5.44e-6 22 2.86e-6 4.71e-5 7.73e-5 1.05e-4 6.48e-5 1.67e-5 6.67e-7 25 1.20e-7 2.32e-5 2.03e-4 3.48e-4 5.24e-4 2.64e-4 5.71e-5 1.05e-6 30 2.76e-6 1.03e-4 6.70e-4 1.64e-3 2.63e-3 1.09e-3 2.27e-4 3.53e-6 35 6.40e-7 9.52e-6 2.02e-4 1.86e-3 5.55e-3 7.95e-3 2.89e-3 5.45e-4 8.66e-6 40 3.74e-6 4.61e-5 6.93e-4 5.10e-3 1.19e-2 1.53e-2 5.10e-3 9.67e-4 1.62e-5 45 1.07e-5 9.47e-5 1.38e-3 1.03e-2 2.26e-2 2.68e-2 8.92e-3 1.64e-3 2.29e-5 50 3.41e-5 2.53e-4 2.99e-3 1.72e-2 3.35e-2 3.65e-2 1.21e-2 2.38e-3 3.57e-5 60 1.48e-4 8.44e-4 7.70e-3 3.81e-2 6.81e-2 7.16e-2 2.40e-2 4.43e-3 6.18e-5 70 4.59e-4 2.12e-3 1.47e-2 6.09e-2 9.95e-2 1.05e-1 3.80e-2 6.73e-3 9.62e-5 100 3.25e-3 9.87e-3 4.63e-2 1.47e-1 2.27e-1 2.36e-1 8.83e-2 1.73e-2 2.20e-4 140 1.18e-2 2.69e-2 9.44e-2 2.56e-1 3.93e-1 4.21e-1 1.75e-1 3.81e-2 4.74e-4 200 3.03e-2 5.61e-2 1.60e-1 3.87e-1 5.91e-1 6.63e-1 3.26e-1 8.21e-2 1.04e-3 300 6.50e-2 1.03e-1 2.46e-1 5.46e-1 8.32e-1 9.92e-1 6.04e-1 1.80e-1 2.72e-3 500 1.26e-1 1.80e-1 3.61e-1 7.43e-1 1.13e-0 1.47e-0 1.15e-0 4.59e-1 9.91e-3 1000 2.32e-1 2.99e-1 5.24e-1 9.98e-1 1.51e-0 2.09e-0 2.17e-0 1.31e-0 6.38e-2 2000 3.36e-1 4.09e-1 6.49e-1 1.18e-0 1.79e-0 2.63e-0 3.25e-0 2.69e-0 3.79e-1 5000 4.16e-1 4.90e-1 7.30e-1 1.25e-0 1.92e-0 2.99e-0 4.28e-0 4.54e-0 2.19e-0 10000 4.21e-1 4.84e-1 6.88e-1 1.13e-0 1.73e-0 2.82e-0 4.55e-0 5.31e-0 4.28e-0 20000 3.81e-1 4.28e-1 5.76e-1 8.83e-1 1.31e-0 2.19e-0 4.09e-0 5.32e-0 5.70e-0