% sputtered energy : Ne -> C % z1=10, m1= 20.18, z2= 6, m2= 12.01, sbe=7.41 eV, rho=1.85 g/cm**3 % ef=0.05 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program : trvmc % ne=24, na= 9 % % e0 0 15 30 45 55 65 75 80 85 % 15 5.96e-8 7.77e-8 16 6.16e-8 2.46e-7 2.17e-7 17 1.87e-7 6.08e-7 6.25e-7 2.08e-7 18 4.97e-7 1.25e-6 1.25e-6 5.86e-7 1.75e-7 20 4.97e-8 3.04e-6 7.13e-6 8.10e-6 3.80e-6 8.81e-7 22 1.36e-7 3.67e-6 8.39e-6 1.46e-5 1.06e-5 2.93e-6 1.55e-7 25 4.47e-9 1.20e-6 1.80e-5 4.22e-5 8.02e-5 4.83e-5 1.08e-5 1.99e-7 30 9.65e-8 6.20e-6 6.60e-5 2.29e-4 4.54e-4 2.21e-4 4.91e-5 6.28e-7 35 1.87e-8 4.36e-7 1.39e-5 2.16e-4 8.56e-4 1.55e-3 6.66e-4 1.28e-4 1.88e-6 40 1.31e-7 2.13e-6 5.38e-5 6.38e-4 1.96e-3 3.13e-3 1.18e-3 2.30e-4 3.31e-6 45 4.11e-7 4.81e-6 1.14e-4 1.36e-3 3.86e-3 5.73e-3 2.24e-3 4.11e-4 4.64e-6 50 1.29e-6 1.34e-5 2.59e-4 2.30e-3 5.81e-3 7.89e-3 3.05e-3 5.99e-4 6.96e-6 60 6.14e-6 4.69e-5 6.79e-4 5.26e-3 1.20e-2 1.60e-2 6.23e-3 1.13e-3 1.20e-5 70 1.90e-5 1.16e-4 1.30e-3 8.34e-3 1.74e-2 2.32e-2 9.82e-3 1.72e-3 1.76e-5 100 1.27e-4 5.28e-4 3.81e-3 1.85e-2 3.70e-2 4.85e-2 2.19e-2 4.25e-3 3.61e-5 140 4.34e-4 1.34e-3 6.98e-3 2.84e-2 5.59e-2 7.65e-2 4.02e-2 8.49e-3 6.73e-5 200 1.02e-3 2.46e-3 1.04e-2 3.66e-2 7.11e-2 1.01e-1 6.45e-2 1.66e-2 1.32e-4 300 1.95e-3 3.96e-3 1.35e-2 4.23e-2 7.96e-2 1.20e-1 9.74e-2 3.13e-2 2.86e-4 500 3.12e-3 5.51e-3 1.58e-2 4.54e-2 8.23e-2 1.31e-1 1.35e-1 6.33e-2 9.19e-4 1000 4.24e-3 6.71e-3 1.66e-2 4.33e-2 7.79e-2 1.27e-1 1.64e-1 1.18e-1 5.53e-3 2000 4.41e-3 6.52e-3 1.48e-2 3.66e-2 6.56e-2 1.12e-1 1.62e-1 1.53e-1 2.62e-2 5000 3.53e-3 5.13e-3 1.11e-2 2.76e-2 4.98e-2 8.85e-2 1.40e-1 1.54e-1 8.59e-2 10000 2.53e-3 3.62e-3 7.82e-3 1.92e-2 3.63e-2 6.70e-2 1.14e-1 1.34e-1 1.11e-1 20000 1.56e-3 2.21e-3 4.71e-3 1.14e-2 2.11e-2 4.12e-2 8.11e-2 1.03e-1 1.04e-1