% sputtering yield : T -> C
% z1= 1, m1=  3.02, z2= 6, m2= 12.01, sbe=7.41 eV, rho=1.85 g/cm**3
% ef=0.98 eV, esb=1.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trvmc
% ne=12, na= 9
%
%  e0     0      15      30      45      55      65      75      80      85
%
   20                  6.00E-6 7.80E-6 
   25  4.70E-5 7.40E-5 1.43E-4 2.15E-4 1.82E-4 1.25E-4 4.14E-5 1.80E-5 7.00E-6
   30  2.44E-4 3.25E-4 6.09E-4 9.78E-4 1.06E-3 9.45E-4 4.38E-4 2.30E-4 9.49E-5
   40  1.23E-3 1.50E-3 2.56E-3 4.41E-3 6.15E-3 6.65E-3 4.37E-3 2.14E-3 6.37E-4
   50  2.76E-3 3.50E-3 5.36E-3 9.16E-3 1.36E-2 1.77E-2 1.32E-2 6.16E-3 1.48E-3
   70  6.05E-3 6.87E-3 1.03E-2 1.97E-2 3.02E-2 4.49E-2 3.92E-2 1.98E-2 3.57E-3
  100  9.44E-3 1.14E-2 1.71E-2 3.20E-2 5.24E-2 7.87E-2 8.63E-2 4.77E-2 6.94E-3
  140  1.28E-2 1.39E-2 2.25E-2 4.44E-2 6.92E-2 1.11E-1 1.38E-1 8.51E-2 1.17E-2
  200  1.54E-2 1.76E-2 2.96E-2 5.58E-2 8.79E-2 1.41E-1 1.91E-1 1.45E-1 2.02E-2
  300  1.75E-2 2.06E-2 3.29E-2 6.32E-2 1.02E-1 1.67E-1 2.35E-1 2.16E-1 4.29E-2
  500  1.87E-2 2.23E-2 3.60E-2 6.58E-2 1.05E-1 1.73E-1 2.64E-1 2.92E-1 9.97E-2
 1000  1.68E-2 2.02E-2 3.32E-2 5.98E-2 9.56E-2 1.61E-1 2.70E-1 3.40E-1 2.36E-1