# sputtering yield : Xe -> C # z1=54, m1=131.30, z2= 6, m2= 12.01, sbe=7.42, 7.40 eV, rho=2.26 g/cm**3 # ef=0.50, esb=0.00, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # program: testvmcx, trspvmcx # ne=45, na=11 # # e0 0 15 30 45 60 65 70 75 77.5 80 85 # 53 2.97e-6 55 4.38e-6 2.34e-6 56 1.01e-5 59 1.00e-5 60 1.71e-5 4.08e-5 61 1.60e-5 63 2.72e-5 65 4.06e-5 1.25e-4 4.49e-5 70 3.19e-6 8.01e-5 3.65e-4 1.23e-4 75 7.66e-6 1.48e-4 8.80e-4 2.85e-4 77 1.24e-3 80 1.60e-5 2.18e-4 1.84e-3 5.67e-4 85 3.35 90 2.12e-6 5.10e-5 5.44e-4 5.63e-3 1.61e-3 95 7.92e-5 100 6.33e-6 1.29e-4 1.15e-3 1.22e-2 3.42e-3 105 1.00e-5 110 1.86e-6 1.76e-5 2.68e-4 6.16e-3 120 5.62e-6 3.88e-5 5.37e-4 4.26e-3 2.20e-2 3.47e-2 4.57e-2 3.70e-2 1.07e-2 130 1.22e-5 7.48e-5 8.54e-4 1.52e-2 135 1.19e-3 140 2.22e-5 1.36e-4 1.49e-3 1.06e-2 150 4.50e-5 2.33e-4 2.40e-3 1.55e-2 6.74e-2 1.04e-1 1.29e-1 1.02e-1 2.86e-2 160 3.82e-4 170 1.24e-4 5.04e-3 2.79e-2 1.62e-1 4.69e-2 180 1.89e-4 8.74e-4 190 1.20e-3 200 4.15e-4 1.62e-3 1.04e-2 5.21e-2 1.89e-1 2.66e-1 3.33e-1 2.74e-1 1.80e-1 8.12e-2 220 8.08e-4 2.64e-3 230 1.11e-3 250 1.70e-3 5.30e-3 2.60e-2 1.06e-1 5.02e-1 1.54e-1 300 4.24e-3 1.07e-2 4.56e-2 1.63e-1 7.67e-1 2.46e-1 300 3.89e-3 500 2.76e-2 5.31e-2 1.52e-1 3.99e-1 1.00e-0 1.83e-0 1.82e-0 6.97e-1 500 3.00e-2 700 6.71e-2 1000 1.27e-1 1.86e-1 3.93e-1 8.39e-1 1.79e-0 3.23e-0 3.82e-0 2.07e-0 1000 1.28e-1 2000 3.25e-1 3000 4.66e-1 6.00e-1 9.81e-1 1.77e-0 3.43e-0 5.92e-0 7.98e-0 7.42e-0 4000 5.99e-1 7000 8.50e-1 10000 1.02e-0 1.19e-0 1.80e-0 3.04e-0 5.47e-0 1.25e+1 1.62e+1 6.77e-0 30000 1.46e-0 1.73e-0 2.43e-0 3.88e-0 1.60e+1 2.28e+1 100000 1.69e-0 1.89e-0 2.53e-0 3.73e-0 1.50e+1 2.45e+1