# sputtering yield : Xe -> Cu # z1=54, m1=131.30, z2=29, m2= 63.54, sbe=3.52 eV, rho= 8.95 g/cm**3 # ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # program: trspvmcx, trspv1cs # ne= 8, na= 1 # # e0 0 # 50 6.48e-3 100 8.69e-2 300 6.50e-1 500 1.17e-0 1000 2.13e-0 2000 3.30e-0 3000 4.09e-0 4000 4.51e-0