# sputtering yield : D -> Ga # z1= 1, m1= 2.01, z2=31, m2= 69.72, sbe=2.82 eV, rho=5.91 g/cm**3 # ef=0.98 eV, esb=1.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # program: testvmcx, IPP 9/82 # ne=10, na= 2 # # e0 0 65 # 30 1.58e-6 8.75e-7 50 2.54e-3 1.63e-3 70 7.80e-3 7.06e-3 100 1.55e-2 2.08e-2 200 3.13e-2 6.90e-2 500 4.45e-2 1.37e-1 1000 4.92e-2 1.65e-1 2000 4.52e-2 1.64e-1 5000 3.48e-2 1.38e-1 10000 2.38e-2 1.05e-1