# sputtered energy : In -> In # z1=49, m1=114.82, z2=49, m2=114.82, sbe=2.52 eV, rho=7.31 g/cm**3 # ef=2.02 eV, esb=2.52 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # program: NEWTRIM (Laszlo) # ne= 9, na= 8 # # e0 0 30 45 55 60 65 70 80 # 20 7.21e-5 1.55e-2 50 2.87e-3 7.44e-2 100 9.76e-3 3.68e-2 7.77e-2 1.09e-1 1.20e-1 1.19e-1 6.89e-2 200 1.79e-2 5.07e-2 9.82e-2 1.36e-1 1.52e-1 1.61e-1 1.57e-1 8.70e-2 500 2.58e-2 1.73e-1 1000 2.76e-2 5.99e-2 1.07e-1 1.51e-1 1.75e-1 1.96e-1 2.08e-1 1.49e-1 2000 2.75e-2 1.69e-1 5000 2.43e-2 1.57e-1 10000 2.06e-2 1.41e-1