% sputtering yield : Xe -> Pd
% z1=54, m1=131.30, z2=46, m2=106.40, sbe=3.91 eV, rho=11.96 g/cm**3
% ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trspvmcx
% ne= 3, na= 1
%
%   e0    30
%
   500  1.95e-0
  1000  3.24e-0
  1500  4.08e-0