% sputtered energy : Xe -> Pd % z1=54, m1=131.30, z2=46, m2=106.40, sbe=3.91 eV, rho=11.96 g/cm**3 % ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program : trspvmcx % ne= 3, na= 1 % % e0 30 % 500 6.04e-2 1000 6.43e-2 1500 6.22e-2