% sputtering yield : Ne -> Pt % z1=10, m1= 20.18, z2=78, m2=195.09, sbe=5.86 eV, rho=21.44 g/cm**3 % ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program : TRVMC95 % ne= 6, na= 1 % % e0 0 % 40 1.63e-3 200 2.61e-1 600 6.75e-1 3000 1.40e-0 5000 1.70e-0 9000 1.76e-0