% sputtered energy : Ar -> Si
% z1=18, m1= 39.95, z2=14, m2= 28.09, sbe=4.70, rho=2.32 g/cm**3
% ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trspvmcx
% ne= 6, na= 1
%
%   e0     0  
%
    50  7.47e-5
   100  1.10e-3
   300  5.65e-3
   500  7.58e-3
  1000  9.26e-3
  4000  8.34e-3