% sputtered energy : D -> Si
% z1= 1, m1=  2.01, z2=14, m2= 28.09, sbe=4.70, rho=2.32 g/cm**3
% ef=0.95 eV, esb=1.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trvmc95
% ne= 2, na= 1
%
%   e0     0
%
    25  1.67e-8
    27  3.28e-7