% sputtered energy : Si -> Si
% z1=14, m1= 28.09, z2=14, m2= 28.09, sbe=4.70 eV, rho=2.32 g/cm**3
% ef=4.65 eV, esb=4.70 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trvmc, trvmc95
% ne= 2, na= 9
%
%  e0      0      15      30      45      55      65      75      80      85
%
   500  9.04e-3 1.33e-2 2.87e-2 6.38e-2 1.01e-1 1.44e-1 1.54e-1 1.12e-1
  2000  9.22e-3 1.23e-2 2.46e-2 5.24e-2 8.53e-2 1.29e-1 1.69e-1 1.60e-1 6.76e-2