% sputtered energy : Xe -> Si
% z1=54, m1=131.30, z2=14, m2= 28.09, sbe=4.70, rho=2.32 g/cm**3
% ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : trspvmcx
% ne= 6, na= 1
%
%   e0     0  
%
    50  8.90e-7
   100  9.24e-5
   300  2.09e-3
   500  3.87e-3
  1000  5.98e-3
  4000  7.87e-3