% sputtered energy : Xe -> Si % z1=54, m1=131.30, z2=14, m2= 28.09, sbe=4.70, rho=2.32 g/cm**3 % ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program : trspvmcx % ne= 6, na= 1 % % e0 0 % 50 8.90e-7 100 9.24e-5 300 2.09e-3 500 3.87e-3 1000 5.98e-3 4000 7.87e-3