% sputtering yield : Ar -> U
% z1=18, m1= 39.95, z2=92, m2=238.03, sbe=5.42 eV, rho=19.07 g/cm**3
% ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : IPP 9/82
% ne=11, na= 1
%
%  e0      0  
%
    50  2.22e-2
   100  1.37e-1
   300  5.07e-1
  1000  1.19e-0
  3000  2.00e-0
 10000  2.77e-0
 30000  3.08e-0
 34300  3.05e-0
100000  2.77e-0
300000  2.10e-0
500000  1.54e-0
