% sputtering yield : C -> W % z1= 6, m1= 12.01, z2=74, m2=183.85, sbe=8.68 eV, rho=19.30 g/cm**3 % ef=3.95 eV, esb=4.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program : testvmcx % only low fluence! % ne=11, na= 1 % % e0 0 % 55 4.77e-5 !ef=0.95, esb=1.00 eV 60 2.68e-4 !ef=0.95, esb=1.00 eV 70 2.25e-3 100 1.23e-2 200 6.24e-2 500 1.66e-1 1000 2.67e-1 2000 3.68E-1 5000 4.54e-1 10000 5.02e-1 40000 4.06e-1 !ef=1.00, esb=1.00 eV