# sputtering yield : Ne -> W # z1=10, m1= 20.18, z2=74, m2=183.85, sbe=8.68 eV, rho=19.29 g/cm**3 # ef=0.20 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) # program: trvmc # ne=14, na=9 # # e0 0 15 30 45 55 65 75 80 85 # 40 9.80E-6 7.70E-6 4.40E-6 1.80E-6 2.00E-6 45 1.64E-4 1.37E-4 1.01E-4 4.66E-5 2.21E-5 4.88E-6 50 7.38E-4 6.43E-4 4.83E-4 2.82E-4 1.44E-4 4.22E-5 2.52E-6 60 3.61E-3 3.30E-3 2.74E-3 1.78E-3 1.09E-3 4.35E-4 5.33E-5 5.00E-6 70 8.44E-3 8.11E-3 7.47E-3 5.27E-3 3.45E-3 1.69E-3 2.95E-4 4.46E-5 80 1.58E-2 1.48E-2 1.41E-2 1.05E-2 7.52E-3 4.17E-3 9.51E-4 1.79E-4 100 3.15E-2 3.13E-2 3.07E-2 2.59E-2 2.11E-2 1.40E-2 4.70E-3 8.37E-4 5.15E-6 140 6.97E-2 6.94E-2 7.15E-2 7.05E-2 6.58E-2 5.08E-2 2.06E-2 4.65E-3 3.58E-5 200 1.23E-1 1.29E-1 1.39E-1 1.50E-1 1.53E-1 1.33E-1 6.38E-2 1.72E-2 1.93E-4 300 2.02E-1 2.14E-1 2.38E-1 2.77E-1 2.91E-1 2.75E-1 1.46E-1 5.07E-2 8.85E-4 400 2.67E-1 2.82E-1 3.22E-1 3.88E-1 4.30E-1 4.11E-1 2.39E-1 9.32E-2 2.23E-3 500 3.24E-1 3.45E-1 4.00E-1 4.88E-1 5.41E-1 5.35E-1 3.37E-1 1.39E-1 4.54E-3 700 4.25E-1 4.44E-1 5.14E-1 6.38E-1 7.16E-1 7.37E-1 5.06E-1 2.38E-1 1.23E-2 1000 5.33E-1 5.62E-1 6.66E-1 8.18E-1 9.43E-1 9.76E-1 7.53E-1 3.99E-1 2.98E-2