% sputtered energy : Xe -> Zr % z1=54, m1=131.30, z2=40, m2= 91.22, sbe=6.33 eV, rho=6.49 g/cm**3 % ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC) % program : % ne= 8, na= 1 % % e0 0 % 50 4.10e-6 50 6.54e-6 50 5.75e-6 50 5.71e-6 100 4.32e-4 200 3.11e-3 500 9.16e-3 1000 1.29e-2