% sputtered energy : Xe -> Zr
% z1=54, m1=131.30, z2=40, m2= 91.22, sbe=6.33 eV, rho=6.49 g/cm**3
% ef=0.50 eV, esb=0.00 eV, ca=1.00, kk0=kk0r=2, kdee1=kdee2=3, ipot=ipotr=1 (KrC)
% program : 
% ne= 8, na= 1
%
%   e0     0  
%
    50  4.10e-6
    50  6.54e-6
    50  5.75e-6 
    50  5.71e-6
   100  4.32e-4
   200  3.11e-3
   500  9.16e-3
  1000  1.29e-2