The recommended data set was compiled by a technical society of The Institute of Electrical Engineers of Japan [in Japanese Report #853, Sep. 2001]. The data set was chosed so that it reproduced measurements of transport data by using a two-term Boltzmann code.
How to get data set
Click name of atom/molecules listed below to open data files.
- Atom
- He, Ne, Ar, Kr, Xe, Rb
- Diatomic molecule
- CO, N2, NO, O2
- Triatomic molecule
- CO2
- Polyatomic molecules
- CF4, CH4, GeH4, SiH4, C2H6, Si2H6
Structure of data file
For example, data file of Ar
890621 39.948 8 dates, atomic/molecular weight, number of processes involved
elastic momentum transfer
40 0 2.746470e-005 number of data, threshold energy (eV), electron energy loss (=2m/M) (eV)
0.000 6.300 electron energy (eV), cross section (10-16 cm2)
0.010 4.500 ・
0.014 3.880 ・
0.017 3.560 ・
・
・
excitation
4 1.549 1.549 number of data, threshold energy (eV), electron energy loss (threshold) (eV)
0.000 0.0000 electron energy (eV), cross section (10-16 cm2)
1.549 0.0000 ・
1.900 0.0029 ・
2.000 0.0028 ・
・
・
electron attachment
4 6.6 -1 number of data, threshold energy (eV), electron energy loss (arbitrary negative number)
0.000 0.00000 electron energy (eV), cross section (10-16 cm2) times 1000
6.600 0.00000 ・
6.700 0.08800 ・
6.800 0.18000 ・
・
・
ionization
3 9.26 9.26 number of data, threshold energy (eV), electron energy loss (threshold) (eV)
0.000 0.000 electron energy (eV), cross section (10-16 cm2)
9.260 0.000 ・
9.600 0.001 ・
・
・
Data source and reference (PDF files)
He, Ne, Ar, Kr, Xe, Rb
O2, CO2, CH4, GeH4, SiH4, C2H6, Si2H6
Acknowledgment
This database is opened under auspice of the technical society "dynamics of atoms and molecules interacting with charged particles, excited species, dissociated species, and photons" of The Institute of Electrical Engineers of Japan.
Copyright (c) 2008 National Institute for Fusion Science